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Clean assembly of van der Waals heterostructures using silicon nitride membranes - Nature Electronics

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Clean assembly of van der Waals heterostructures using silicon nitride membranes - Nature Electronics

Van der Waals heterostructures are fabricated by layer-by-layer assembly of individual two-dimensional materials and can be used to create a wide range of electronic devices. However, current assembly techniques typically use polymeric supports, which limit the cleanliness—and thus the electronic performance—of such devices. Here, we report a polymer-free technique for assembling van der Waals heterostructures using flexible silicon nitride membranes.

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Clean assembly of van der Waals heterostructures using silicon nitride membranes - Nature Electronics

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Clean assembly of van der Waals heterostructures using silicon nitride membranes - Nature Electronics

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