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Flexible radio-frequency micro electro-mechanical switch towards the applications of satellite communications - npj Flexible Electronics
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This paper presents a flexible radio-frequency microelectromechanical system (RF MEMS) switch integrated on cyclo-olefin polymer (COP) substrate using a modified surface MEMS processing technology, which could be used in the 17–19 GHz frequency band of satellite communication. Through systematic simulation analysis, it is found that flexible RF MEMS switch can achieve certain bending radius by miniaturizing the electronic dimension, without degrading the RF performance.
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