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A resonant high-pressure microsensor based on a composite pressure-sensitive mechanism of diaphragm bending and volume compression - Microsystems & Nanoengineering

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A resonant high-pressure microsensor based on a composite pressure-sensitive mechanism of diaphragm bending and volume compression - Microsystems & Nanoengineering

In this paper, a composite pressure-sensitive mechanism combining diaphragm bending and volume compression was developed for resonant pressure microsensors to achieve high-pressure measurements with excellent accuracy. The composite mechanism was explained, and the sensor structure was designed based on theoretical analysis and finite element simulation.

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A resonant high-pressure microsensor based on a composite pressure-sensitive mechanism of diaphragm bending and volume compression - Microsystems & Nanoengineering

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A resonant high-pressure microsensor based on a composite pressure-sensitive mechanism of diaphragm bending and volume compression - Microsystems & Nanoengineering

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