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Combining thermal scanning probe lithography and dry etching for grayscale nanopattern amplification - Microsystems & Nanoengineering

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Combining thermal scanning probe lithography and dry etching for grayscale nanopattern amplification - Microsystems & Nanoengineering

Grayscale structured surfaces with nanometer-scale features are used in a growing number of applications in optics and fluidics. Thermal scanning probe lithography achieves a lateral resolution below 10 nm and a vertical resolution below 1 nm, but its maximum depth in polymers is limited.

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technology dry etching grayscale nanopatterns amplification nanoengineering thermal lithography

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Combining thermal scanning probe lithography and dry etching for grayscale nanopattern amplification - Microsystems & Nanoengineering

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Combining thermal scanning probe lithography and dry etching for grayscale nanopattern amplification - Microsystems & Nanoengineering

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