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High-throughput manufacturing of epitaxial membranes from a single wafer by 2D materials-based layer transfer process - Nature Nanotechnology

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High-throughput manufacturing of epitaxial membranes from a single wafer by 2D materials-based layer transfer process - Nature Nanotechnology

Layer transfer techniques have been extensively explored for semiconductor device fabrication as a path to reduce costs and to form heterogeneously integrated devices. These techniques entail isolating epitaxial layers from an expensive donor wafer to form freestanding membranes. However, current layer transfer processes are still low-throughput and too expensive to be commercially suitable.

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High-throughput manufacturing of epitaxial membranes from a single wafer by 2D materials-based layer transfer process - Nature Nanotechnology

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High-throughput manufacturing of epitaxial membranes from a single wafer by 2D materials-based layer transfer process - Nature Nanotechnology

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